SEMI C94 - Guide for Cyclohexanone
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16, 2016. Available at www.semiviews.org and www.semi.org in May 2016.
The purpose of this Document is to provide a guide for cyclohexanone for which a need has been identified.
The scope of this Document covers tiers of cyclohexanone which are used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1- Guide for the Analysis of Liquid Chemicals