SEMI C95 - Guide for Pentakis Dimethylamino Tantalum

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16, 2016. Available at and in May 2016.


The purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified.


The scope of this Document covers a tier of PDMAT, which is used in the semiconductor industry for the deposition of tantalum nitride based layers by atomic layer deposition.


Referenced SEMI Standards


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