SEMI C96 - Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries -

Abstract

The purpose of this Test Method is to provide a standardized test method for measuring the density of slurries, defining the sample temperature for the density measurement and specifying the number of significant figures to which the resulting measurement should be measured by the user and reported in the corresponding Certificate of Analysis (CoA) from the supplier.

This Test Method describes the conditions and procedures for measuring the density of single or multi-component slurries with offline (benchtop) metrology instrumentation.

 

This Test Method provides a common basis for communication between slurry manufacturers and users.

 

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

 

Revision History

SEMI C96-1121 (technical revision)

SEMI C96-0618 (first published)

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