SEMI C96 - Test Method for Determining Density of Chemical Mechanical Polish (CMP) Slurries
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in June 2018.
The purpose of this Document is to provide a standardized test method for measuring the density of slurries, defining the sample temperature for the density measurement and specifying the number of significant figures to which the resulting measurement should be measured by the user and reported in the corresponding Certificate of Analysis (CoA) from the supplier.
This Document describes the conditions and procedures for measuring the density of single or multi-component slurries with offline (benchtop) metrology instrumentation.
This Document provides a common basis for communication between slurry manufacturers and users.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals