SEMI C97 - Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinder
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in November 2018.
NOTICE: This Document replaces SEMI C6.2, SEMI C6.3, SEMI C6.4, SEMI C6.5, SEMI C6.6, and SEMI C6.7.
This Document is intended to provide particle specification and test method for oxygen (O2), hydrogen (H2), and nitrogen (N2) gases that are delivered as pipeline (bulk) gases or those contained in high pressure gas cylinders, in order to control particulate contamination from those gases.
This Document provides particle specification for gases, delivery source and particle grades as listed in Table 1.
Referenced SEMI Standards