SEMI C101 - Test Method for Determining pH of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals -

Abstract

This Standard will define the test method for measuring and reporting the pH of slurries and post-chemical mechanical planarization (pCMP) cleaning chemicals in certificate of analysis (CoA) documents and define at what temperature the sample is measured. This Test Method will recommend the management of attainable significant figures in reporting based on current metrology capabilities. This Test Method will also recommend sample collection and preparation techniques.

This Test Method applies to slurries and pCMP application chemicals determined by the manufacturer and/or IDM to be relevant as a measure of material quality.

 

This Test Method describes the conditions and procedures for measuring the pH of single or multi-component slurries and pCMP chemicals with offline (benchtop) metrology instrumentation.

 

This Test Method provides a common basis for communication between slurry manufacturers and users.

 

Referenced SEMI Standards (purchase separately)

SEMI C1 — Guide for the Analysis of Liquid Chemicals

 

Revision History

SEMI C101-0621 (first published)

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