SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) -
The purpose of this Guide is to recommend procedures for trace iron analysis in high purity 2-propanol (IPA) needed by the semiconductor industry.
The scope of this Guide is the measurement of iron concentration in IPA, used in the semiconductor industry, with higher purity than Grade 4 IPA described in SEMI C41.
The quantitative range of this method is 1 to 100 ppt.
Instruments (bottles, etc.) for sampling IPA to be analyzed are described.
A procedure for quantitative analysis of trace iron levels in IPA sampled in bottles is described.
Ultrapure water and nitric acid to be used are described.
Referenced SEMI Standards (purchase separately)
SEMI C41 — Specification and Guide 2-Propanol
SEMI C105-0923 (first published)
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