SEMI D3 - Quality Area Specification for Flat Panel Display Substrates -

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Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI D3-91 (Reapproved 0709) - Inactive



This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at and in July 2009; originally published in 1991; previously published July 2003.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Document defines various areas on the pattern surface of a flat panel display substrate and describes their relationship. It assumes the existence of terminology and a banking convention described in other SEMI flat panel display documents.


Referenced SEMI Standards

SEMI D9 — Terminology for FPD Substrates

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