SEMI D5 - Standard Size for Flat Panel Display Substrates
This Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003; originally published in 1993; previously published in 1994.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Standard covers the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate.
These dimensions apply to substrates that are principally used in fabricating AMLCD displays. These dimensions may also be applicable to substrates for other display types. The edge lengths specified range from 300 × 300 mm to 500 × 500 mm. A single thickness, 1.1 mm, applied to all substrates.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D12 — Specification for Edge Condition of Flat Panel Display (FPD) Substrates