SEMI D6 - Specification for Liquid Crystal Display (LCD) Mask Substrates

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in January 2017; originally published in 1992; previously published February 2011.

 

This Specification defines standard for substrates used to fabricate liquid crystal display masks.

 

This Specification applies to photomasks that are principally used in fabricating liquid crystal displays. The edge lengths specified range from 202.8 mm × 202.8 mm to 1220 mm × 1400 mm.

 

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).

 

Referenced SEMI Standards

SEMI P1 — Specification for Hard Surface Photomask Substrates

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