D00600 - SEMI D6 - Specification for Liquid Crystal Display (LCD) Mask Substrates

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

This Specification defines standard for substrates used to fabricate liquid crystal display masks.

This Specification applies to photomasks that are principally used in fabricating liquid crystal displays. The edge lengths specified range from 202.8 mm × 202.8 mm to 1220 mm × 1400 mm.


Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).


Referenced SEMI Standards (purchase separately)

SEMI P1 — Specification for Hard Surface Photomask Substrates


Revision History

SEMI D6-0211 (Reapproved 0117)

SEMI D6-0211 (technical revision)

SEMI D6-0308 (technical revision)

SEMI D6-0305 (technical revision)

SEMI D6-1101 (technical revision)

SEMI D6-0699 (technical revision)

SEMI D6-1296 (technical revision)

SEMI D6-92 (first published)

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