SEMI D6 - Specification for Flat Panel Display (FPD) Mask Substrates -

Abstract

This Specification defines the standard for substrates used to fabricate flat panel display masks.

This Specification applies to photomasks that are principally used in fabricating flat panel displays. The edge lengths specified range from 202.8 mm × 202.8 mm to 1620 mm × 1780 mm.

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1).

Referenced SEMI Standards (purchase separately)

SEMI P1 — Specification for Hard Surface Photomask Substrates

Revision History

SEMI D6-0623 (technical revision)

SEMI D6-0211 (Reapproved 0117)

SEMI D6-0211 (technical revision)

SEMI D6-0308 (technical revision)

SEMI D6-0305 (technical revision)

SEMI D6-1101 (technical revision)

SEMI D6-0699 (technical revision)

SEMI D6-1296 (technical revision)

SEMI D6-92 (first published)

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