SEMI D7 - FPD Glass Substrate Surface Roughness Measurement Method
This Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003; originally published in 1994.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document defines the method of FPD glass substrate surface roughness measurement by stylus method surface roughness measurement instrument.
This Specification shall be used by vendors and/or buyers of glass substrates for flat panel display and is effective for all glass substrates used.
Referenced SEMI Standards