SEMI D9 - FPD基板の用語

Volume(s): Flat Panel Display
Language: Japanese
Type: Single Standards Download (.pdf)
Abstract

本用語集は,FPD Materials and Components Committeeで技術的に承認されたもので,Japanese FPD Materials and Components Committeeが直接責任を負うものである。現版は2003110日にJapanese Regional Standards Committeeにて承認されている。20031月にまずwww.semi.orgで入手可能になり,20033月発行に至る。初版は1994年発行,前版は200111月発行。

 

本文書は,FPD基板の内部および表面上の物質や欠陥の用語と定義,ならびに寸法特性・熱特性・化学特性・光学特性・機械特性を提供する。

 

本用語集と定義は,FPD製造に使用されるフロント基板とバック基板に適用される。

 

Referenced SEMI Standards

SEMI D3 — Quality Area Specification for FPD Substrates

SEMI D5 — Standard Size for FPD Substrates

SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method

SEMI D11 — Specification for FPD Glass Substrate Cassettes

SEMI D12 — Specification for Edge Conditions of FPD Substrates

SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method

SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

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