D00900 - SEMI D9 - Terminology for FPD Substrates

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Document was reapproved with minor editorial changes.


This Document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates.

These terms and definitions are applicable to both front and back substrates used in FPD fabrication.


Referenced SEMI Standards (purchase separately)

SEMI D3 — Quality Area Specification for Flat Panel Display Substrates

SEMI D5 — Standard Size for Flat Panel Display Substrates

SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method

SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes

SEMI D12 — Specification for Edge Conditions of Flat Panel Display (FPD) Substrates

SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method

SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays


Revision History

SEMI D9-0303 (Reapproved 0321)

SEMI D9-0303 (Reapproved 0515)

SEMI D9-0303 (Reapproved 0709)

SEMI D9-0303 (technical revision)

SEMI D9-1101 (technical revision)

SEMI D9-94 (first published)

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