SEMI D9 - Terminology for FPD Substrates -

Abstract

1  Purpose
1.1  This Standard provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates.
2  Scope
2.1  These terms and definitions are applicable to both front and back substrates used in FPD fabrication.
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Referenced SEMI Standards (purchase separately)
SEMI D7 — FPD Glass Substrate Surface Roughness Measurement Method
SEMI D15 — FPD Glass Substrate Surface Waviness Measurement Method
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI D9-0626 (technical revision)
SEMI D9-0303 (Reapproved 0321)
SEMI D9-0303 (Reapproved 0515)
SEMI D9-0303 (Reapproved 0709)
SEMI D9-0303 (technical revision)
SEMI D9-1101 (technical revision)
SEMI D9-94 (first published)

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