SEMI D10 - Test Method for Chemical Durability of Flat Panel Display Glass Substrates
This Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003; originally published in 1995.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This test procedure evaluates quantitatively the durability of flat panel display (FPD) glass substrates using reagents employed in FPD production processes.
This Standard may be used by vendors and/or buyers of glass substrates for FPD.
This Standard defines three methods for testing chemical durability of various flat panel display substrates: (Method A) Weight Loss, (Method B) Step Measurement Using Profilometry, and (Method C) Surface Haze. Each method provides a measure of the amount of material that is removed from a substrate during a controlled chemical reaction sequence. This sequence is nominally identical for each method.
Referenced SEMI Standards
SEMI D5 — Standard Size for FPD Display Substrates
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