SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes
This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www.semi.org in July 2009; originally published in 1995; previously published July 2003.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document describes cassettes that are used with glass substrates in the fabrication and processing of subassemblies and masks for flat panel displays (FPD).
This Document applies to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D6 — Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates
SEMI D9 —Terminology for FPD Substrates
SEMI D21 — Definitions for Flat Panel Display Masks
SEMI E1 — Specification for 3 inch, 100 mm, 125 mm, and 150 mm Plastic and Metal Wafer Carriers