SEMI D12 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates
This Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www.semi.org in July 2003; originally published in 1995.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document defines various aspects of the edges of a flat panel display substrate and describes their relationships. It assumes the existence of terminology described in other SEMI Flat Panel Display Documents. It applies to substrates whose nominal thickness specification is 1.1 mm.
Significance — The edges of a flat panel display substrate are important in both the specifications for and uses of the material. They effect the means for producing, handling, storing, and processing substrates. Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates