SEMI D13 - Terminology for FPD Color Filter Assemblies
This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in November 2013; originally published in 1995; previously published July 2008.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
These terms and definitions describe various elements and characteristics of FPD color filter (CF) assemblies. They are intended to assist in future CF standardization activity.
Color filters comprise the plate assembly in a colored flat panel display. They consist of a number of material layers such as substrate, color filter layer, black matrix, overcoat layer, and transparent conductive films. Each of these layers has various properties which may need to be specified, produced, controlled, and characterized. This Document provides an overview of these layers, with terms and definitions for selected elements, and indicates the appearance of some color filter defects. This Document may be useful in developing material specifications, inspection criteria, and test methods.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D20 — Terminology for FPD Mask Defect
SEMI D21 — Terminology for FPD Mask Pattern Accuracy
SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array
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