SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method
This method was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www.semi.org June 2003; to be published July 2003. Originally published December 1996.
This document covers the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement methods.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D9 — Definitions for Flat Panel Display Substrates