SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port
This specification was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Stadards Committee July 1998. Published on SEMI OnLine September 1998.
This specification defines featu re requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment.
Referenced SEMI Standards
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes