SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port
This Specification defines feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These feature requirements facilitate the interfacing of transport equipment to the tool by standardizing the feature requirements. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment.
Referenced SEMI Standards
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D11 — Specification for Flat Panel Display Glass Substrate Cassettes
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