SEMI D18 - Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates
This specification was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 15, 1998. Initially available at www.semi.org September 1998; to be published February 1999.
E This document was editorially modified in October 2000 to correct a formatting error. Changes were made to Figure 5.
This standard specifies the cas settes used to horizontally transport and store glass substrates 0.7 mm-1.1 mm thick (max) in a flat panel display (FPD) manufacturing facility.
Referenced SEMI Standards
SEMI D3 — Quality Area Specification for Flat Panel Display Substrates
SEMI D5 — Standard Size for Flat Panel Display Substrates
SEMI D6 — Standard Edge Length and Thickness for Flat Panel Display Mask Substrates
SEMI D9 — Definitions for Flat Panel Display