D02000 - SEMI D20 - Terminology for FPD Mask Defect

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Document defines defect terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.


These terms apply to photomasks that are principally used in fabricating flat panel display.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI D20-0706 (Reapproved 0221)

SEMI D20-0706 (Reapproved 0815)

SEMI D20-0706 (technical revision)

SEMI D20-1000 (technical revision)

SEMI D20-93E (editorial revision)

SEMI D20-93 (first published)

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