SEMI D20 - Terminology for FPD Mask Defect -

Abstract

1  Purpose
1.1  This Document defines defect terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.
2  Scope
2.1  These terms apply to photomasks that are principally used in fabricating flat panel display.
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Referenced SEMI Standards (purchase separately)
None

Revision History
SEMI D20-0706 (Reapproved 0826)
SEMI D20-0706 (Reapproved 0221)
SEMI D20-0706 (Reapproved 0815)
SEMI D20-0706 (technical revision)
SEMI D20-1000 (technical revision)
SEMI D20-93E (editorial revision)
SEMI D20-93 (first published)

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