D02100 - SEMI D21 - Terminology for FPD Mask Pattern Accuracy
This Document defines terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.
These terms apply to photomasks that are principally used in fabricating flat panel display.
Referenced SEMI Standards (purchase separately)
SEMI D21-0706 (Reapproved 0221)
SEMI D21-0706 (Reapproved 0815)
SEMI D21-0706 (technical revision)
SEMI D21-1000 (technical revision)
SEMI D21-92 (first published)
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