SEMI D21 - Terminology for FPD Mask Pattern Accuracy
This Standard was technically approved by the Flat Panel Display – Material & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published in 1992; previously published July 2006.
This Document defines terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.
These terms apply to photomasks that are principally used in fabricating flat panel display.
Referenced SEMI Standards