SEMI D21 - Terminology for FPD Mask Pattern Accuracy
This Document defines terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.
These terms apply to photomasks that are principally used in fabricating flat panel display.
Referenced SEMI Standards (purchase separately)
SEMI D21-0706 (Reapproved 0221)
SEMI D21-0706 (Reapproved 0815)
SEMI D21-0706 (technical revision)
SEMI D21-1000 (technical revision)
SEMI D21-92 (first published)
|Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.|
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.