SEMI D21 - Terminology for FPD Mask Pattern Accuracy

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Document defines terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.


These terms apply to photomasks that are principally used in fabricating flat panel display.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI D21-0706 (Reapproved 0221)

SEMI D21-0706 (Reapproved 0815)

SEMI D21-0706 (technical revision)

SEMI D21-1000 (technical revision)

SEMI D21-92 (first published)

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00