SEMI D23 - Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment
This guide was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the Japanese Flat Panel Display Equipment Committee. Current edition approved by the Japanese Regional Standards Committee on June 1, 1999. Initially available on SEMI OnLine August 1999; to be published September 1999.
The purpose of this document is to provide a standard, simple CEO calculation method for evaluating FPD manufacturing equipment. With this document, the following merits can be expected: Both panel and equipment manufacturers, as well as material manufacturers can work from the same standard with regard to cost; Panel manufacturers’ basis for equipment comparison will become clear, which will, in turn, help in equipment selection; The document will serve to clarify cost reduction items as well as benchmark cost reduction activities; Direction for improvement for equipment manufacturers will become clear. By doing a separate analysis, comparison, and evaluation of lines, equipment for different substrate sizes will become simpler.
Referenced SEMI Standards