D02700 - SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces

Volume(s): Equipment Automation Software / Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

This guide was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 28, 2000. Initially available at www.semi.org August 2000; to be published October 2000.


This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility.


Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services

SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O

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