SEMI D28 - Specification for Mechanical Interface Between Flat Panel Display Material Handling Equipment and Tool Port, Using Automated Guided Vehicle (AGV), Rail Guided Vehicle (RGV), and Manual Guided Vehicle (MGV)
This Standard was technically approved by the Flat Panel Display - Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. Available at www.semi.org in July 2008; originally published November 2001.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Specification defines a common set of feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. These standardized feature requirements are intended to facilitate the interfacing of AGV, RGV, and MGV equipment to the process tool. Such standards are intended to promote cost-effective interfacing while preserving freedom of choice in material handling equipment, using AGV, RGV, and MGV.
This Specification defines mechanical features on or about the tool port, and in front of or on the tool face. Although these features are intended for specific functions of AGV, RGV, and MGV, the interface requirements are meant to avoid the promotion of any particular form of transport.
Referenced SEMI Standards