SEMI D31 - Guide for Definition of Measurement Index (DSemu) for Luminance Mura in FPD Image Quality Inspection -

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Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI D31-0318 - Current



This Standard was technically approved by the Flat Panel Display – Metrology Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at and in March 2018; originally published November 2002; previously published February 2013.


This Standard defines the index of measurement for mura in flat panel display (FPD) image quality inspection.


This Standard defines distance factor.


Based on the result of investigation for human eye’s sensitivity to mura in ergonomics approach, this Standard proposes an index for level of mura by expressing the function of the major axis and contrast of mura.


This Standard is applicable to FPD excluding Cathode-ray tube (CRT) and head mount display (HMD). Applicable display sizes are from Type 10 (10 inch diagonal) to Type 100 (100 inch diagonal). Viewing distance ranges from 0.5 m to 5 m.


Referenced SEMI Standards

SEMI D57 — Definition of Measurement Index (VCT) for Mura in FPD Image Quality Inspection

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