SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification
This Standard was technically approved by the Flat Panel Display – Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www.semi.org in July 2009; originally published March 2003.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Specification provides the location, dimensions, and message size of the marking symbol that consists of a two-dimensional code symbol and related alpha numeric characters (capable of being read visually through the reader camera and display) and is located outside of the quality area of glass flat panel display (FPD) substrate.
The marking symbol in this Specification allows the inclusion of identification information for each individual substrate together with the additional information previously provided by various orientation corner (OC) cut shapes.
Thus, this Specification allows suppliers of glass substrates for FPDs to simplify substrate information management by marking such information in one location around the OC on the substrate, before shipping. In addition, use of this marking symbol will facilitate the future elimination of the numerous types of OC cut shapes presently in use.
The marking symbol covered by this specification is intended for use by suppliers and purchasers of glass substrates for FPDs.
This Specification provides for a standardized OC location in support of future unification of the OC cut shape as well as location. When this is done, the provisional nature of the specification can be removed.
This Specification covers the content, dimensions, and surface positioning of the marking symbol located outside of the quality area of glass substrates for FPD use.
This marking symbol is marked in a manner and location to avoid affecting the user patterning process.
Although this Specification does not specify the marking technique to be employed when complying with its requirements, it is assumed that the marking symbol will be obtained by laser marking individual dots.
Marking symbols are applicable across all stages of FPD processing, from virgin substrates to fully patterned substrates. The format and algorithm for the Data Matrix code is based on two-dimensional symbology specified in ISO/IEC 16022.
Referenced SEMI Standards