SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks -

Abstract

This Guide defines the quality area of FPD masks.
 

This Guide applies to masks that are principally used in fabricating flat panel displays. The mask size specifies range from 202.8 mm × 202.8 mm to 1620 mm × 1780 mm.

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1).

Referenced SEMI Standards (purchase separately)
SEMI D6 — Specification for Flat Panel Display (FPD) Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates

Revision History
SEMI D38-0624 (technical revision)
SEMI D38-0723 (technical revision)
SEMI D38-0211 (Reapproved 0117)
SEMI D38-0211 (technical revision)
SEMI D38-0304 (first published)

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