SEMI D38 - Guide for Quality Area of LCD Masks
This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in January 2017; originally published March 2004; previously published February 2011.
This Guide defines the quality area of LCD masks.
This Guide applies to masks that are principally used in fabricating liquid crystal displays. The mask size specifies range from 202.8 × 202.8 mm to 1220 × 1400 mm.
Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (see SEMI P1).
Referenced SEMI Standards
SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates