SEMI D38 - LCD用マスクの有効範囲のガイド
Volume(s):
Flat Panel Display
Language:
Japanese
Type:
Single Standards Download (.pdf)
Abstract
本スタンダードは，global Flat Panel Display – Mask Committeeで技術的に承認されている。現版は2010年12月21日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年2月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は2004年3月発行。
本ガイドは，LCD用マスクの有効範囲を規定する。
Referenced SEMI Standards
SEMI D6 — Specification for Edge Length and Thickness for Liquid Crystal Display (LCD) Mask Substrates
SEMI P1 — Specification for Hard Surface Photomask Substrates
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