SEMI D40 - Terminology for FPD Substrate Deflection
This Standard was technically approved by the Flat Panel Display - Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 30, 2004. Available at www.semi.org in July 2004.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Document provides the terms and definitions of a physical transformation when flat panel display (FPD) substrates are maintained statically.
These terms and definitions are applicable to both front and back substrates used in FPD fabrication.
Referenced SEMI Standards