SEMI D41 - Measurement Method of SEMI MURA in FPD Image Quality Inspection -

This Standard was technically approved by the Flat Panel Display – Factory Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 24, 2004. Available at www.semi.org in March 2005.

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

This Standard will define the application of the formula derived in SEMI D31 to various test conditions closed to visual inspection for MURA in flat panel display (FPD) image quality inspection.

SEMI D31 has derived a formula to detect defects and blemishes in FPD in comparison with human eyes and CCD based instruments.

In general, the difficulty of implementing instruments to replace human inspector lays on human factor variation with its origin and location.

This Standard is applicable to FPDs. This Standard mainly deals with both the measurement method of Semu and the revised definition of Semu. The target display size is typically from 20.3 cm (8 in.) to 76.2 cm (30 in.) diagonal.