SEMI D42 - Specification for Ultra Large Size Mask Substrate Case
This Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process.
The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process. The objective substrate range for the mask size defined by this Standard is 850 × 1,200 mm and more.
The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the substrate. This Specification defines the handling volume for mask substrate inside the case.
Referenced SEMI Standards (purchase separately)
SEMI D42-0421 (technical revision)
SEMI D42-0308 (Reapproved 0815)
SEMI D42-0308 (technical revision)
SEMI D42-0305 (first published)
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