D04200 - SEMI D42 - Specification for Ultra Large Size Mask Substrate Case

SEMI D42 - Specification for Ultra Large Size Mask Substrate Case -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI D42-0421 - Current

Revision

Abstract

This Standard defines the specification for ultra large size substrate case used in flat panel display (FPD) manufacturing process.


The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process. The objective substrate range for the mask size defined by this Standard is 850 × 1,200 mm and more.

 

The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the substrate. This Specification defines the handling volume for mask substrate inside the case.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI D42-0421 (technical revision)

SEMI D42-0308 (Reapproved 0815)

SEMI D42-0308 (technical revision)

SEMI D42-0305 (first published)


Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

You May also Like