SEMI D42 - Specification for Ultra Large Size Mask Substrate Case
This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published March 2005; previously published March 2008.
This Standard defines the specification for ultra large size substrate case used in liquid crystal display (LCD) manufacturing process.
The specification defined by this Standard is applicable to the case for containing substrate materials used in LCD mask manufacturing process. The objective substrate range for the mask size defined by this Standard is 850 × 1,200 mm and more.
The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the substrate. This Specification defines the handling volume for mask substrate inside the case.
Referenced SEMI Standards