SEMI D43 - Test Method for Mechanical Vibration in AMHS for FPD Manufacturing
This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 8, 2005. It was available at www.semi.org in October 2005.
In FPD manufacturing, customers have requirements concerning vibration of handling cassettes caused by the handling equipment during transportation. However, measurement methods and measurement locations are unclear. This test method clarifies the measurement methods and measurement locations. This standard will specify measurement method and measurement points, for vibration occurring at contact points between AMHS and cassettes used for handling.
Referenced SEMI Standards