SEMI D44 - Specification for Reference Position of Single Substrate for Handing Off On Tool -

Abstract

This standard was technically approved by the global Flat Panel Display - Factory Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006. E This standard was editorially modified in February 2007 to correct an error. Changes were made to ¶ 6.2.2.4.

 

This standard defines the datum line that specifies the position of the FPD manufacturing equipment, the position of the substrate, and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment.

　

Referenced SEMI Standards

SEMI D9 — Terminology for FPD Substrates
SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

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