SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool
This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007.
This standard defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.
Referenced SEMI Standards
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