SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at in October 2007.


This standard defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.


Referenced SEMI Standards

SEMI D9 — Terminology for FPD Substrates

SEMI D24 — Specification for Glass Substrates Used to Manufacture Flat Panel Displays

SEMI D32 — Specification for Improved Information Management for Glass FPD Substrates through Orientation Corner Unification

SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool

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