SEMI D49 - Specification of Single Substrate Orientation for Loading/Unloading Into/From Equipment to Specify ID Reader Position
This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2007. It was available at www.semi.org in June 2007.
This standard is intended to further specify the single substrate ID reader position by specifying more clearly the orientation of single substrate for loading/unloading indicated with a virtual datum line that is prescribed in SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool.
Referenced SEMI Standards
SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool