SEMI D51 - Specification for Handshake Method of Single Substrate for Handling Off/On Tool in FPD Production
This standard was technically approved by the global Flat Panel Display – Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009. Originally published March 2008.
Due to the migration to large substrate sizes in FPD production, the demand for single substrate transfer, with the extensive combined use of Automated Material Handling Systems (AMHS), robots and conveyors, is increasing. On the other hand, each FPD fab uses different handshake specifications for single substrate transfer, which creates issues such as increase in cost, as well as delay in delivery and testing. It is imperative to define a handshake method for transferring single substrates to the process equipment in order to solve these issues. The purpose of this specification is to standardize the handshake methods for transferring single substrates, which are currently different at each FPD fab. It is expected that this will result in improved efficiency in the design, production and installation of equipment, as well as in cost reduction.
Referenced SEMI Standards
SEMI D44 — Specification for Reference Position of Single Substrate for Handling Off On Tool