SEMI D52 - Specification for Reference Position of Substrate ID -

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Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI D52-0708E - Inactive



This standard was technically approved by the global Flat Panel Display - Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at in June 2008.


E This standard was editorially modified in September 2008 to correct an error. Changes were made to ¶ 6.1.3 and ¶ 6.1.4.


SEMI D32 only specifies one Bare Glass ID position, however, it is necessary to assign multiple substrate IDs for efficient operation as the sizes become larger. Therefore, this standard specifies substrate ID positions for efficient operation based on SEMI D32.


Referenced SEMI Standards


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