SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles
This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks.
These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays. The mask size specifies range from 330 × 450 mm to 1220 × 1400 mm.
Referenced SEMI Standards (purchase separately)
SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates
SEMI D53-0421 (technical revision)
SEMI D53-0708 (Reapproved 0815)
SEMI D53-0708 (first published)
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