SEMI D53 - Specification for Liquid Crystal Display (LCD) Pellicles
This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www.semiviews.org and www.semi.org in August 2015; originally published July 2008.
This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks.
These dimensions apply to pellicle for masks that are principally used in fabricating liquid crystal displays. The mask size specifies range from 330 × 450 mm to 1220 × 1400 mm.
Referenced SEMI Standards
SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates