SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles -

Abstract

1  Purpose
1.1  This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks.
2  Scope
2.1  These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays. The mask size specifies range from 330 mm × 450 mm to 1620 mm × 1780 mm.
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Referenced SEMI Standards (purchase separately)
None.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI D53-0626 (technical revision)
SEMI D53-0421 (technical revision)
SEMI D53-0708 (Reapproved 0815)
SEMI D53-0708 (first published)

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