SEMI D67 - Test Methods for Antifouling Property and Chemical Resistance of FPD Polarizing Films and Its Materials

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the global Flat Panel Display – Materials & Components Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in February 2012.


This Standard establishes test methods for the antifouling property and chemical resistance of FPD polarizing films and its related materials.


These test methods can be applied in research and development, quality control and manufacturing. These test methods are also useful for research and development as well as applicability of cleaning agents for the surface of FPDs.


Referenced SEMI Standards


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