SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Flat Panel Display – Materials & Components Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at and in January 2016


Plastic films/substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Document provides procedures for the measurement environmental condition to measure dimensions of plastic films/substrates.


This Standard provides guidance for measuring dimensions of plastic films/substrates for electronic devices.


Referenced SEMI Standards

SEMI D66 — Terminology for Plastic Substrates for Flexible Display

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