SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time -
Abstract
High gas barrier property is required to plastic films for
electronic devices such as flexible displays. The purpose of this Standard is
regulation for determining the water vapor transmission rate of plastic film
using a quadrupole mass spectrometer as detector.
Determination of water vapor barrier property
of plastic films with high gas barrier used for electronics devices such as
flexible displays.
Referenced SEMI Standards (purchase separately)
None.
Revision History
SEMI D80-0421 (first published)
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