SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Film in a Short Time
High gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation for determining the water vapor transmission rate of plastic film using a quadrupole mass spectrometer as detector.
Referenced SEMI Standards (purchase separately)
SEMI D80-0421 (first published)
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