D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks

SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI D84-0823 - Current

Revision

Abstract

 

This Standard defines the terminology for FPD phase shift masks and mask blanks.

 

This Standard applies to phase shift masks and mask blanks that are principally used in fabricating flat panel displays.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI D84-0823 (first published)

 

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