SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements/System Requirements

Revision: SEMI D88-0325 - Current

Revision

Abstract

 

1  Purpose
1.1  This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage.
2  Scope
2.1  This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in FPD manufacturing.
 

Referenced SEMI Standards (purchase separately)
None.

 

Revision History
SEMI D88-0325 (first published)

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Customer Reviews

Be the first to write a review
0%
(0)
0%
(0)
0%
(0)
0%
(0)
0%
(0)