SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Flat Panel Display
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI D88-0325 - Current

Revision

Abstract

 

1  Purpose
1.1  This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage.
2  Scope
2.1  This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in FPD manufacturing.
 

Referenced SEMI Standards (purchase separately)
None.

 

Revision History
SEMI D88-0325 (first published)

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