SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in May 2012; originally published in 1994; previously published July 2006.

 

This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto-transport use as well as high-speed extraction of the wafers in processing equipment.

 

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

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