SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in April 2018; originally published in 1980; previously published June 2012.
This Standard provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other.
The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and packaging. A host is a computer or network of computers which exchange information with the equipment to accomplish manufacturing. This Standard includes the description of the physical connector, signal levels, data rate and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path. This Standard does not define the data contained within a message. The meaning of messages must be determined through some message content standard such as SEMI E5, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II).
Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation