SEMI E5 - SEMI 장비 커뮤니케이션 표준2 메세지 내용 -

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Volume(s): Equipment Automation Software
Language: Korean
Type: Single Standards Download (.pdf)
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Revision: SEMI E5-0813 - Superseded



This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at and in August 2013. Originally published in 1982; previously published July 2012.

The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in § 6.

It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.

The messages defined in the Standard support the most typical activities required for IC manufacturing. The Standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages. While certain activities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.

SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.

SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.

The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

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