SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

E This Standard was editorially modified in September 2020 to correct a publication error. Changes were made to Table 3 to delete the ERCACK row, and add back the ERACK row that was deleted in error.


The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.


It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in § 6.


It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.


The messages defined in the Standard support the most typical activities required for IC manufacturing. The Standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages. While certain activities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.


SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.


SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.


The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.


Referenced SEMI Standards (purchase separately)

SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E37 — Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

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