E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

In the past, confusion has existed in the values of standard temperature and standard pressure when gas flow is expressed in ‘standard’ volumetric units. To eliminate this confusion, the Mass Flow Controllers Committee has established this Standard.


This Standard provides a common basis for communication between manufacturers and users.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI E12-0421 (technical revision)

SEMI E12-1213 (technical revision)

SEMI E12-0303 (Reapproved 0309)

SEMI E12-0303 (technical revision)

SEMI E12-96 (technical revision)

SEMI E12-91 (technical revision)

SEMI E12-86 (first published)

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