E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers

SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E12-0421 - Current

Revision

Abstract

 

1  Purpose
1.1  This Guide is intended to provide a common basis for values of standard temperature and pressure when gas flow is expressed in standard volumetric units.
2  Scope
2.1  This Standard provides a common basis for communication between manufacturers and users. This Standard is applicable to all gases and vapors used in semiconductor processing.

 

Referenced SEMI Standards (purchase separately)
None.

 

Revision History
SEMI E12-0421 (technical revision)
SEMI E12-1213 (technical revision)
SEMI E12-0303 (Reapproved 0309)
SEMI E12-0303 (technical revision)
SEMI E12-96 (technical revision)
SEMI E12-91 (technical revision)
SEMI E12-89 (technical revision)
SEMI E12-88 (first published)

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