SEMI E15 - Specification for Tool Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at and in October 2016; originally published in 1990; previously published March 2010.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


NOTICE: This Document was reapproved with minor editorial changes.


This Standard is intended to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.


This Specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems, including humans, and wafer fabrication/inspection equipment (tools). The concept defines the placement and orientation of a wafer carrier on a tool to allow reasonable interfacing with mechanized material movement systems without compromising human access to perform the material exchange function.


Referenced SEMI Standards

SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers
SEMI E19 — Standard Mechanical Interface (SMIF)

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