E01500 - SEMI E15 - Specification for Tool Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This Standard is intended to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.


This Specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems, including humans, and wafer fabrication/inspection equipment (tools). The concept defines the placement and orientation of a wafer carrier on a tool to allow reasonable interfacing with mechanized material movement systems without compromising human access to perform the material exchange function.

 

Referenced SEMI Standards (purchase separately)

SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers

SEMI E19 — Standard Mechanical Interface (SMIF)

 

Revision History

SEMI E15-0698E2 (Reapproved 1016)

SEMI E15-0698E2 (Reapproved 0310)

SEMI E15-0698E2 (Reapproved 0703)

SEMI E15-0698E (Reapproved 0703)

SEMI E15-0698E (editorial revision)

SEMI E15-0698 (technical revision)

SEMI E15-96 (technical revision)

SEMI E15-95 (technical revision)

SEMI E15-90 (first published)

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