SEMI E15 - Specification for Tool Load Port
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
NOTICE: This Document was reapproved with minor editorial changes.
This Standard is intended to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.
This Specification deals with the mechanical interface (load port) for wafer carrier transfer between wafer carrier material transport systems, including humans, and wafer fabrication/inspection equipment (tools). The concept defines the placement and orientation of a wafer carrier on a tool to allow reasonable interfacing with mechanized material movement systems without compromising human access to perform the material exchange function.
Referenced SEMI Standards
SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers
SEMI E19 — Standard Mechanical Interface (SMIF)