SEMI E15.1 - Specification for 300 mm Tool Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at in October 2010; originally published in 1996; previously published March 2005.


NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Specification defines dimensional requirements for the load ports of 300 mm wafer process and inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated wafer carrier transport systems, and/or to meet ergonomic requirements for manually loaded equipment.


This Standard covers 300 mm equipment only. Similar requirements covering equipment for 200 mm wafers and smaller are covered in SEMI E15.


Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 —Specification for Enhanced Carrier Handoff Parallel I/O Interface

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